Technical specifications
- Material
- 316L stainless steel
- Flow range
- 0.1 sccm-40 slpm by configuration
- Connection
- 1/4 in VCR
- Cleanliness
- Dead volume and filtration down to 0.003 um by configuration
Information for quotation
- 01Gas purity
- 02Leak tightness
- 03Flow range and pressure drop
Typical applications
- 01High-purity gases
- 02Semiconductor lines
- 03Distribution manifolds
Custom configuration
Surface finish, connection, required leak rate and internal cleanliness are confirmed.
